• MF5100B Mass Flow Controller

MF5100B Mass Flow Controller

THE MODEL MF5100B MASS FLOW CONTROLLER FEATURES EXTENDED CAPABILITY OF RANGES UP TO 400 SLM, HIGHER TERMPERATURE STABILITY AND MANY FUNCTIONS.
Model : MF5100B

OHKURA offers a wide variety of products for mass flow control in the form of controllers and meters, our large range includes both gas and liquid flow controllers so you are sure to find one that meets your requirements. All our mass flow control products offer high accuracy and a fast response time.



  • MINIMUM RANGE OF 5 SCCM & UP TO 400 SLM
  • COMPACT SIZE
  • STANDARD SOFT-START FUNCTION
  • MINIMUM LEAKAGE OF 1.013 × 10-10Pa·m3/s (He)


  1. Automotive Test System
  2. Semiconductor Process
  3. FPD Process
  4. Food and Beverage 
  5. Environmental Control
  6. Furnace 

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